| 摘要 |
PURPOSE:To increase the throughput of a laser trimming device by providing a scanner, digital multimeter which measures the characteristic of a selected element to be trimmed, and arithmetic section which finds a trimming amount from obtained measurements and transfers the found trimming amount to a computer. CONSTITUTION:A measurement arithmetic section 30 is provided with a measurement stage 12 which supports a monolithic IC 11 in a state where the characteristic of the IC 11 can be detected, scanner 13 which selects a trimming resistance as an element to be adjusted mounted on the IC 11 and switches the measuring point of the resistance, and digital multimeter 14 which is switched by a command from the scanner 13 and makes measurement. This laser trimming device is provided with an arithmetic section 15 which calculates such a trimming amount as zero point, span, and temperature characteristics of the zero point and span, etc., on the basis of the measurements of the section 30 and transfers the calculated values to a computer 10 on a main body section 20 side as a trimming target value in addition to the section 30. Therefore, a monolithic IC laser trimming device having a high-accuracy and high-speed trimming performances is obtained. |
