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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH05166797(A)
申请公布日期
1993.07.02
申请号
JP19910334672
申请日期
1991.12.18
申请人
FUJITSU LTD
发明人
TANABE RYUICHIRO;DEGUCHI TATSUYA
分类号
H01L21/316;H01L21/318;H01L21/76
主分类号
H01L21/316
代理机构
代理人
主权项
地址
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