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发明名称
VAPOR-PHASE SILICON EPITAXIAL GROWTH APPARATUS
摘要
申请公布号
JPH05226255(A)
申请公布日期
1993.09.03
申请号
JP19920004346
申请日期
1992.01.14
申请人
NEC CORP
发明人
SUZUKI TATSUYA
分类号
H01L21/205;H01L21/302;H01L21/306
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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