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发明名称
PRODUCTION OF SEMICONDUCTOR WITH MULTILAYERED WIRING CONSTRUCTION
摘要
申请公布号
JPH06163725(A)
申请公布日期
1994.06.10
申请号
JP19920330006
申请日期
1992.11.16
申请人
NIPPON STEEL CORP
发明人
TANI TOMOFUNE
分类号
H01L21/316;H01L21/31;H01L21/3205;H01L21/768;H01L23/52;(IPC1-7):H01L21/90;H01L21/320
主分类号
H01L21/316
代理机构
代理人
主权项
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