MICRO OR NANOFLUIDIC CHIP HAVING PDMS THIN COATED-NOA CHANNEL AND MANUFACTURE METHOD THEREOF

摘要

A micro or nano fluid chip consisting of NOA channels including a thin PDMS layer and a manufacturing method of the same are provided to flow the fluid within the channel of the fluid chip as the capillary phenomena. A micro or nano fluid chip comprises a channel(103) and a thin PDMS layer(105). The channel is comprised of a NOA(norland optical adhesive). The thin PDMS layer is piled on the channel. The thin PDMS layer is finished with the oxygen plasma. A cover layer(107) is formed on the side of the thin PDMS layer. A SAM layer(self assembled monolayers, 104) is formed on the lower part of the thin PDMS layer.