shallow trench isolation process,申请号KR20057016595-传众专利搜索

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发明名称	shallow trench isolation process
摘要
申请公布号	KR100728173(B1)	申请公布日期	2007.06.13
申请号	KR20057016595	申请日期	2005.09.06
申请人		发明人
分类号	H01L21/76;H01L;H01L21/00;H01L21/26;H01L21/336;H01L21/42;H01L21/762;H01L21/8234;H01L21/8238;H01L27/00;H01L29/00;H01L29/06;H01L29/10;H01L29/772;H01L31/0328;H01L31/0336;H01L31/072;H01L31/109	主分类号	H01L21/76
代理机构		代理人
主权项
地址

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