发明名称 METHOD FOR PRODUCING A SEMICONDUCTOR-ON-INSULATOR STRUCTURE
摘要 The invention relates to a process of treating a structure for electronics or optoelectronics, wherein the structure that has a substrate, a dielectric layer having a thermal conductivity substantially higher than thermal conductivity of an oxide layer made of an oxide of a semiconductor material, an oxide layer made of an oxide of the semiconductor material, and a thin semiconductor layer made of the semiconductor material. The process includes a heat treatment of the structure in an inert or reducing atmosphere with a temperature and a duration chosen for inciting an amount of oxygen of the second oxide layer to diffuse through the semiconductor layer so that the thickness of the second oxide layer decreases by a determined value. The invention also relates to a process of manufacturing a structure for electronics or optoelectronics applications through the use of this type of heat treatment.
申请公布号 EP2095406(A1) 申请公布日期 2009.09.02
申请号 EP20060842378 申请日期 2006.12.26
申请人 S.O.I.TEC SILICON ON INSULATOR TECHNOLOGIES 发明人 KONONCHUK, OLEG
分类号 H01L21/322;H01L21/762 主分类号 H01L21/322
代理机构 代理人
主权项
地址
您可能感兴趣的专利