发明名称 Spatial light modulator mirror metal having enhanced reflectivity
摘要 In accordance with the teachings of the present invention, a spatial light modulator mirror metal having enhanced reflectivity is provided. In a particular embodiment of the present invention, a light processing system includes a light source operable to provide a light beam along a light path and a spatial light modulator positioned in the light path, the spatial light modulator comprising an array of pixel elements, each pixel element comprising a deformable micro-mirror operable to reflect the light beam in at least one direction. At least a portion of each deformable micro-mirror comprises an Al-Cu alloy. A controller electrically connected to the spatial light modulator is operable to provide electrical signals to the spatial light modulator to cause the spatial light modulator to selectively deform the pixel elements, thereby selectively reflecting incident light beams along a projection light path.
申请公布号 US7576902(B2) 申请公布日期 2009.08.18
申请号 US20060517523 申请日期 2006.09.06
申请人 TEXAS INSTRUMENTS INCORPORATED 发明人 NEIDRICH JASON M.;BARRON LANCE W.
分类号 G02B26/00;G02B26/08;G02F1/29 主分类号 G02B26/00
代理机构 代理人
主权项
地址