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发明名称
SUBSTRATE PROCESSING SYSTEM
摘要
申请公布号
KR100912280(B1)
申请公布日期
2009.08.17
申请号
KR20020075426
申请日期
2002.11.29
申请人
发明人
分类号
B65G49/07;G02F1/13;B65G49/06;H01L21/00;H01L21/677;H01L21/68;(IPC1-7):G02F1/13
主分类号
B65G49/07
代理机构
代理人
主权项
地址
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