发明名称 IMPROVED SOLUTION DEPOSITION ASSEMBLY
摘要 Methods and devices are provided for improved sputtering systems. In one embodiment of the present invention, a deposition system for use with a substrate, the system comprising a solution deposition apparatus; at heating chamber; and at least assembly for holding solution over the substrate to allow for a depth of at least about 0.5 microns to 10 mm.
申请公布号 WO2009029954(A3) 申请公布日期 2009.07.23
申请号 WO2008US75063 申请日期 2008.09.02
申请人 ROUSSILLON, YANN;UTTACHOO, PIYAPHANT 发明人 ROUSSILLON, YANN;UTTACHOO, PIYAPHANT
分类号 H01L21/208;H01L31/042 主分类号 H01L21/208
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