| 摘要 |
PROBLEM TO BE SOLVED: To provide a composition of a polishing liquid for a hard disk substrate capable of reducing roll-off of a substrate. SOLUTION: The composition of the polishing liquid for the hard disk substrate contains alumina particles, silica particles and water, wherein a volume medium particle diameter of the silica particle ranges from 20 to 150 nm and a content of the silica particles with a particle diameter of not larger than 10 nm in the silica particles ranges from 0.1 to 25 vol.%. COPYRIGHT: (C)2009,JPO&INPIT |
