| 摘要 |
PROBLEM TO BE SOLVED: To determine quality of a work without any misrecognition even if the work is held by a holding mechanism such as a holding section. SOLUTION: In an inspection apparatus 1, an illumination section 3 having a ring-like light source section 33 for irradiating the work 2 with light and a photographing section 4 for photographing the work 2 are provided, the holding section 5 for holding the work 2 is arranged fixedly or movably between the illumination section 3 and the photographing section 4, and the photographing section 4 is arranged at a position deviating from that in the irradiation direction of light applied to the work 2 from the light source section 33 of the illumination section 3. Then, when there are indeterminate objects including a foreign matter in the work 2, the optical path of light applied to the work 2 from the light source section 33 is changed by indeterminate objects including foreign matters and the light is photographed by the photographing section 4. COPYRIGHT: (C)2009,JPO&INPIT |
