| 摘要 |
PROBLEM TO BE SOLVED: To provide a tilt adjusting device for a workpiece that surely tilts a placement body for placing an workpiece, in a manner to match varied tilt due to different tips of a plurality of probe needles of a probe card and can conduct highly reliable inspection by bringing the probes into contact with the workpiece at a uniform contact load, and to provide a probe device. SOLUTION: The probe device 10 includes a placement table 11, a probe card 13, first and second cameras 21 and 22, and a controller 15. The device also includes a tilt driving means 23 to tilt the placement body 11A on the basis of positional information on the needle tips of a plurality of probes 13A and a plurality of electrode pads which is sent from the first and second cameras 21 and 22, and a displacement quantity detection means 24 to detect a displacement quantity of the tilted placement body 11A. The tilt driving means 23 works jointly with the displacement quantity detection means 24 under control of the controller 15, so that the tilt of the placement body 11A is coincided with the tilt of needle tips of the probes 13A. COPYRIGHT: (C)2009,JPO&INPIT
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