Piezomotorized Z-drive for adjusting e.g. microscope table, of microscope, has piezo motors in form of piezo crystals, provided in support, where each motor has legs that are separately controllable by control device

摘要

The drive has a support (1) arranged fixedly at a stand, where a set of piezo motors (5, 6) in form of piezo crystals is provided in the support and each motor includes a set of legs (7-10). The legs are separately controllable by a control device (11). A part of the legs are controlled so that the part of legs fixedly stays in effective connection with a microscope table and/or with a turret carrier (2) of a microscope and another part of the legs is adjusted in relation to the former part in a direction corresponding to feed motion and magnitude corresponding to the feed motion.