PRESSURE SENSOR AND METHOD OF MANUFACTURING THE SAME

摘要

Provided are a pressure sensor having better ability of preventing entry of water and dust into a cavity than conventional products and a method of manufacturing the pressure sensor. The pressure sensor has the cavity (7) formed in a lower silicon substrate (4), a diaphragm (8) formed by an SiO2 film (5) and an upper silicon substrate (6) that are located above the cavity, a base substrate (2) joined to the lower silicon substrate (4), and a pressure introduction hole (20) formed in a base substrate (2).The maximum opening width (T1) of the pressure introduction hole (20) is smaller than the height (T2) of the cavity (7). The base substrate (2) has a water repelling film which is formed only on a side wall surface (20a) of the pressure introduction hole (20).