| 摘要 |
<P>PROBLEM TO BE SOLVED: To independently drive each of two members, having different response characteristics during driving operation, while allowing them to cooperate with each other. <P>SOLUTION: A stage device includes a first structure, constituted by including a stage; a second structure for supporting the first structure; a first drive means for driving the first structure to a command position by imparting a first drive force thereto; a second drive means for driving the second structure so as to allow the second structure to follow the first structure by imparting a second drive force thereto; and a control means (an FF control part 203, an FB control part 206) that controls the first drive force and the second drive force so as to compensate for the difference between response characteristics of the first structure driven by the first drive means and those of the second structure driven by the second drive means. <P>COPYRIGHT: (C)2009,JPO&INPIT |
