SCATTERING CHARACTERISTIC EVALUATION DEVICE AND METHOD

摘要

PROBLEM TO BE SOLVED: To provide a scattering characteristic evaluation device and scattering characteristic evaluation method for obtaining distribution of scattered light intensity at every micro angle near the optical axis of radiated light flux without moving a detector. SOLUTION: This scattering characteristic evaluation device 10 comprises the detector 2 where the centers of detecting elements having a ring-like light receiving surface of different radii are arranged concentrically on the optical axis of the light flux, and a condenser lens 4. The scattering characteristic evaluation device 10 comprises an evaluation section 24 that calculates scattered light intensity Ciin unit area in a sphere B using transmitting area Siwhen light guided to the light receiving surface of the detecting elements has transmitted through a sphere B and light intensity Eidetected by the i-th detecting element assuming the sphere B whose center is a measurement point O, and evaluates the transmission scattering characteristics of light of a sample F to be evaluated based on the distribution of the scattered light intensity Ciin the angle range from the scatter angleΘ1to the scatter angleΘI. COPYRIGHT: (C)2009,JPO&INPIT