| 摘要 |
The present invention relates to a vacuum chuck which is devised in such a way as to be able to lower costs and reduce weight and able to shorten the clamping time. The present invention comprises: a main body (100) which is provided with supporting projections (110) and vacuum recesses (111) arranged in a lattice over the upper surface, and which has setting, vacuum and filter spaces (120), (121) and (122) formed on the inside, and in which vacuum holes (123) passing through to the vacuum recesses (111) are formed on the upper part of the filter space (122), and which is provided with intake and outlet ports (130) and (131) respectively passing through to the setting space (120) and vacuum space (121) on its two lower sides; an air-reduction valve (B), a vacuum sensor (S) and a vacuum generator (V) and a filter (F) provided on the setting, vacuum and filter spaces (120), (121) and (122) of the main body (100); pressure and vacuum gauges (200) and (300) which are respectively fitted to both sides at the front of the main body (100), and which pass through to the intake port (130) and the vacuum space (121); a switch (400) which is for opening and closing the vacuum space (121), and which is provided in such a way that it can move forwards and backwards in the centre at the front of the main body (100); a main-body cover (500) which is fastened in hermetic fashion to the lower part of the main body (100); and a filter cover (600) which is fastened in hermetic fashion to the lower part of the filter space (122). |
