| 摘要 |
PROBLEM TO BE SOLVED: To provide an electro-optical device such as a liquid crystal, in which a layered structure is flattened with high accuracy and a high-quality image can be displayed. SOLUTION: The electro-optical device includes a substrate (10), a plurality of pixels (9a) fabricated in a pixel region (10a) on the substrate, peripheral circuits (101, 104) fabricated in a peripheral region positioning in a periphery of the pixel region on the substrate, an insulating film (43) formed so as to cover the pixel region and the peripheral region in a plane view on the substrate, and a flatness monitoring section (200) formed in an underlay side from the insulating film on the substrate, for monitoring flatness of the insulating film surface. The flatness monitoring section is placed in a proximity region in the peripheral region, the proximity region being close to the pixel region in such a manner that a level difference between a part of the surface of the insulating film overlapping the plurality of the pixels and another part of the surface overlapping the flatness monitoring section does not exceed a prescribed threshold. COPYRIGHT: (C)2009,JPO&INPIT |
