HEATER-CUM-TEMPERATURE SENSOR ELEMENT, AIR FLOW SENSOR USING SAME, VACUUM PAD, TUBE WITH ELECTRICALLY CONDUCTIVE FILM, AND AIR FLOW DETECTION APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide an ultracompact, high speed response, and inexpensive heater-cum-temperature sensor element which makes a temperature sensor operate also as a heater by self-heating, provide a high-speed and highly sensitive air flow sensor using the element, apply the air flow sensor to a vacuum pad to provide it with high-speed response, and provide an air flow detection apparatus using the same.

SOLUTION: A heater-cum-temperature sensor is formed in a cantilever-like membrane thermally separated from a substrate to form two terminals. Its chip is provided with an ultracompact size of approximately 1 mm across. The heater-cum-temperature sensor element is mounted to a microspace in the vicinity of a flow inlet of an air flow as the air flow sensor. This is applied to the vacuum pad, and the element is mounted to the vicinity of an adsorption pad. A tube with an electrically conductive film in which an electrically conductive film is formed inside and outside is provided to eliminate the need for complicated wires between a body having a power circuit etc. and the air flow sensor. The air flow sensor is further used to form the compact air flow detection apparatus having at least an amplification circuit; an arithmetic circuit; and a control circuit.

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