Apparatus for inspection includes an imaging assembly, including a plurality of cameras, which are mounted in different, respective locations in the imaging assembly and are configured to capture respective images of a sample. A motion assembly is configured to move at least one of the imaging assembly and the sample so as to cause the imaging assembly to scan the sample with a scan accuracy that is limited by a predetermined position tolerance. An image processor is coupled to receive and process the images captured by the cameras so as to locate a defect in the sample with a position accuracy that is finer than the position tolerance.
