Protective layer for charged-particle-beam processing

摘要

A protective layer is applied to a work piece (104) to protect the surface during charged particle beam processing by directing a fluid (112) toward the surface. The surface is preferably not touched by the applicator (108). Ink jet print-type print heads are suitable applicators. Ink jet-type print heads allow a wide variety of fluids to be used to form the protective layer. Useful fluids that form protective layers include colloidal silica having small silver particles, hydrocarbon-based inks, and dyes.