发明名称 |
METHOD OF PREVENTING GENERATION OF ARC DURING RAPID ANNEALING BY JOULE HEATING |
摘要 |
Disclosed herein is a rapid annealing method in a mixed structure composed of a heat treatment-requiring material, dielectric layer and conductive layer, comprising that during rapid annealing on a predetermined part of the heat treatment-requiring material, by instantaneously generated intense heat due to Joule heating by application of an electric field to the conductive layer, the potential difference between the heat treatment-requiring material and the conductive layer is set lower than the dielectric break-down voltage of the dielectric layer, thereby preventing generation of arc by dielectric breakdown of the dielectric layer during the annealing. |
申请公布号 |
EP2027598(A4) |
申请公布日期 |
2009.07.22 |
申请号 |
EP20070708480 |
申请日期 |
2007.01.10 |
申请人 |
ENSILTECH CORPORATION;RO, JAE-SANG |
发明人 |
RO, JAE-SANG;HONG, WON-EUI |
分类号 |
H01L21/324 |
主分类号 |
H01L21/324 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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