OPTICAL WAVEGUIDE-TYPED SURFACE PLASMON RESONANCE SENSOR

摘要

A surface plasmon resonance sensor of an optical waveguide is provided to measure the liquid or the gas of the extremely little amount due to the small size. A surface plasmon resonance sensor of an optical waveguide comprises a substrate(310), an optical waveguide, a light guide part(350) and a metallic foil(370). The substrate is made of the material in which the light is transmitted. A first cladding layer, a second cladding layer and a core layer guiding the test light income from the outside are successively laminated on one part of the substrate. The optical waveguide has the bigger refractive index of the core layer than the one of the first and second cladding layer. The one side surface of the light guide part is arranged on the substrate to be connected to the side surface of the optical waveguide and the other side surface is inclined to the top surface of the optical waveguide. The light guide part guides the test light emitted from the core layer. The metallic foil generates the surface plasma wave with the test light incoming at the predetermined resonance angle and reflects the test light incoming at the angle excepting the resonance angle.