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发明名称
SPATIAL LIGHT MODULATOR AND METHOD FOR PERFORMING DYNAMIC PHOTOLITHOGRAPHY
摘要
申请公布号
EP1695122(A4)
申请公布日期
2009.07.22
申请号
EP20040814459
申请日期
2004.12.14
申请人
AGILENT TECHNOLOGIES, INC.
发明人
NISHIMURA, KEN, A.;SCHROEDER, DALE, W.
分类号
G02B26/00;G02B;G02B26/02;G02B26/08;G02F1/00;G02F1/01;G02F1/03;G02F1/07;G02F1/29;G03F7/20
主分类号
G02B26/00
代理机构
代理人
主权项
地址
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