发明名称 Process for producing high quality large size silicon carbide crystals
摘要 The invention is an improvement in the method of producing a high quality bulk single crystal of silicon carbide in a seeded sublimation system. In a first embodiment, the improvement comprises reducing the number of macrosteps in a growing crystal by incorporating a high concentration of nitrogen atoms in the initial one (1) millimeter of crystal growth.
申请公布号 US7563321(B2) 申请公布日期 2009.07.21
申请号 US20040006997 申请日期 2004.12.08
申请人 CREE, INC. 发明人 POWELL ADRIAN;TSVETKOV VALERI F.;BRADY MARK;LEONARD ROBERT T.
分类号 C30B23/00;H01L29/04 主分类号 C30B23/00
代理机构 代理人
主权项
地址