| 摘要 |
A magnetic bearing system for use in a vacuum pump including a motor provided with a rotary blade. The magnetic bearing system including a rotary shaft rotationally holding said rotor, a motor for rotationally driving said rotary shaft, a magnetic levitation section for supporting said rotor relative to a stator through said rotary shaft in a non-contact manner, a rotation detection section for detecting a rotational speed of said rotor, a rotor-temperature detection section for detecting a temperature of said rotor; a carrier-wave generation section for supplying a common carrier wave to each of a plurality of sensors provided in said magnetic levitation section, said rotation detection section and said rotor-temperature detection section, and an A/D conversion section for sampling a sensor signal output from each of said sensors, in synchronization with said carrier wave.
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