SRAM CELL WITH ASYMMETRICAL TRANSISTORS FOR REDUCED LEAKAGE

摘要

A method of fabricating an SRAM cell with reduced leakage is disclosed. The method comprises fabricating asymmetrical transistors in the SRAM cell. The transistors are asymmetrical in a manner that reduces the drain leakage current of the transistors. The fabrication of asymmetrical pass transistors comprises forming a dielectric region (516) on a surface of a substrate having a first conductivity type. A gate region (500) having a length and a width is formed on the dielectric region. Source and drain extension regions (506, 510) having a second conductivity type are formed in the substrate on opposite sides of the gate region. A first pocket impurity region (508) having a first concentration and the first conductivity type is formed adjacent the source. A second pocket impurity region having a second concentration and the first conductivity type may be formed adjacent the drain. If formed, the second concentration is smaller than the first concentration, reducing the gate induced drain leakage current.