| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor inspection device for diagnosing using pattern data capable of solving the problem that the pattern data stored in a hard disc are transferred to a memory at a plurality of times, and thus, an amount of time is increased by the number of the times of transfer, and it takes longer to diagnose. SOLUTION: The pattern data are temporarily held in a buffer, and is transferred to a plurality of regions in the memory from the buffer by using hardware transfer. The pattern data are compressed and stored, and decompressed in the buffer to transfer to the memory. A transfer time can be reduced to shorten a diagnosis time. COPYRIGHT: (C)2009,JPO&INPIT
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