INTEGRATED DISPLACEMENT SENSORS FOR PROBE MICROSCOPY AND FORCE SPECTROSCOPY

摘要

In accordance with an embodiment of the invention, there is a force sensor (200) for a probe based instrument. The force sensor (200) can comprise a detection surface (202) and a flexible mechanical structure (204) disposed a first distance above the detection surface (202) so as to form a gap between the flexible mechanical structure (204) and the detection surface (202), wherein the flexible mechanical structure (204) is configured to deflect upon exposure to an external force, thereby changing the first distance.