| 摘要 |
A linear motor is provided in which a magnetic attracting force acting between a stator and a mover is mechanically cancelled by arrangement of armature units, and can be easily assembled. The linear motor includes a primary-side member in which magnets are arranged in a traveling direction and a secondary-side member in which armature units each including a core and an armature winding are arranged in the traveling direction and in which a spacer is interposed between the armature units. The primary- and secondary-side members relatively move. When a side-surface member is slid in Y direction, the dovetail groove of the side-surface member and the dovetail tenon of the spacer are fitted together, and are combined together in a dovetail joint. When an upper-surface member is slid in the X direction, the dovetail groove and tenon are fitted together to have a dovetail joint there. The armature units and the spacers are combined together. A driving stage and an XY driving stage including this linear motor are also provided.
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