发明名称 System for determining correct position of mask in storage of coordinate measuring machine, has coordinate measuring machine, where each storage is assigned to ultrasonic system
摘要 #CMT# #/CMT# The system has a coordinate measuring machine, where storage is assigned to an ultrasonic system (55). The existence of the mask is determined in the storage or the position of the mask is determined in the storage or the tilting of the mask is determined in the storage. #CMT#USE : #/CMT# System for determining correct position of a mask in storage of a coordinate measuring machine. #CMT#ADVANTAGE : #/CMT# The system has a coordinate measuring machine, where storage is assigned to an ultrasonic system, and hence ensures reliable determination of mask position. #CMT#DESCRIPTION OF DRAWINGS : #/CMT# The drawing shows a schematic front view of a position determination system. 35 : Loading opening 50 : Housing 52 : Pressure regulator 54 : Display 55 : Input unit.
申请公布号 DE102007049103(A1) 申请公布日期 2009.04.16
申请号 DE20071049103 申请日期 2007.10.11
申请人 VISTEC SEMICONDUCTOR SYSTEMS GMBH 发明人 GOETZ, UWE
分类号 G01B17/00;H01L21/68 主分类号 G01B17/00
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