| 摘要 |
PROBLEM TO BE SOLVED: To prevent an error from occurring due to a fluctuation in height of a measurement apparatus by a curved surface. SOLUTION: An optical characteristic measurement apparatus includes: an illumination optical system for illuminating a sample surface of a planar sample or a curved sample having a predetermined curvature; a light receiving optical system for receiving a reflection light from the illuminated sample surface; and a housing for containing the illumination optical system and the light receiving optical system, and causing the sample surface to externally contact a region of the housing facing the sample during a measurement. When a vertex position of the curved sample is disposed within the housing nearer than the sample surface of the planar sample, and the sample surface of the curved sample contacts the facing region and positioned, the illumination optical system can illuminate the vertex position in an opening of the facing region at a predetermined angle, and the light receiving optical system can receive the light from the illuminated vertex position at a predetermined angle. COPYRIGHT: (C)2009,JPO&INPIT
|
