发明名称 |
MAGNETIC ANNEALING TOOL HEAT EXCHANGE SYSTEM AND PROCESSES |
摘要 |
A heat exchange system and processes for a magnetic annealing tool is provided. The system includes a process chamber housing workpieces to be processed; an element chamber partly surrounding the periphery of the process chamber, at least one means for drawing a vacuum in fluid communication with the process chamber and separately with the element chamber in order to apply a vacuum to either or both of the process and element chamber so as to promote radiation heating of the workpieces; at least one supply of fluid in communication with the process chamber and separately with the element chamber to supply a cooling gas so as to promote conductive cooling of the workpieces; a cooling chamber disposed to surround the element chamber; and means for generating a magnetic field disposed on the outer periphery of the cooling chamber.
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申请公布号 |
US2009095737(A1) |
申请公布日期 |
2009.04.16 |
申请号 |
US20080330060 |
申请日期 |
2008.12.08 |
申请人 |
JIBB RICHARD JOHN;BILLINGHAM JOHN FREDRIC;DUFFY EDWARD;O'SHAUGHNESSY NOEL;MCMAHON KEVIN;FERRIS PETER |
发明人 |
JIBB RICHARD JOHN;BILLINGHAM JOHN FREDRIC;DUFFY EDWARD;O'SHAUGHNESSY NOEL;MCMAHON KEVIN;FERRIS PETER |
分类号 |
H05B6/10 |
主分类号 |
H05B6/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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