ELECTROMECHANICAL COMPONENT VIBRATING AT NANOMETRIC OR MICROMETRIC SCALE WITH ENHANCED DETECTION LEVEL

摘要

The invention relates to an electromechanical component vibrating at a nanometric or micrometric scale that comprises a vibrating mechanical member (1) interacting with at least one so-called detection electrode (2). The detection electrode (2) is flexible and can vibrate in phase-opposition relative to the vibrating mechanical member (1). The invention can be used in resonators and movement detectors.