| 摘要 |
PROBLEM TO BE SOLVED: To provide a sublimate measuring device in a heat treatment room, capable of accurately measuring the quantity of sublimate contained in sublimate gas generated in the heat treatment room. SOLUTION: This sublimate measuring device comprises a sublimate gas guide room 3 which can introduce sublimate gas E with maintaining the temperature of the sublimate gas E generated in the heat treatment room 110, a gas guide means 10 which guides gas G with a lower temperature than the sublimate gas E into the sublimate gas guide room 3 so that sublimate S is deposited from the sublimate gas E inside the sublimate gas guide room 3, and a sublimate quantity measuring means 13 which is provided to the downstream of the sublimate gas guide room 3 and measures the quantity of the deposited sublimate S. COPYRIGHT: (C)2009,JPO&INPIT
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