发明名称 PROBE CARD TEST APPARATUS AND METHOD
摘要 <p>A probe card analyzer mounts on a probe card in a wafer prober and a use a fixture in the wafer probe and switch electronics in place of an ATE head. Methods of testing can confirm that probe cards are operating within their specifications over large temperature ranges and the mechanical force ranges seen in real manufacturing environments. This reduces the cost and improves the accuracy and speed of analyzing probe cards and improves diagnosing problems with probe cards.</p>
申请公布号 WO2009048618(A1) 申请公布日期 2009.04.16
申请号 WO2008US11667 申请日期 2008.10.10
申请人 MOK, SAMMY;SWIATOWIEC, FRANK;AGAHDEL, FARIBORZ;VERACONNEX, LLC 发明人 MOK, SAMMY;SWIATOWIEC, FRANK;AGAHDEL, FARIBORZ
分类号 G01R31/02 主分类号 G01R31/02
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