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发明名称
METHOD FOR TESTING A SLURRY USED TO FORM A SEMICONDUCTOR DEVICE
摘要
申请公布号
EP1943320(B1)
申请公布日期
2009.04.15
申请号
EP20050824088
申请日期
2005.10.25
申请人
FREESCALE SEMICONDUCTOR, INC.
发明人
MONNOYER, PHILIPPE;FARKAS, JANOS;SEBAAI, FARID
分类号
C09G1/00;G01N15/04;H01L21/30
主分类号
C09G1/00
代理机构
代理人
主权项
地址
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