| 摘要 |
<p>An apparatus for transferring a substrate is provided to simplify an assembly and an operation of a driving part by reducing the number of parts operating the driving part. A driving part(110) includes a first body(111), a second body(113), and a third body(115). The first body is fixed in a lower surface of a chamber or an LM guide. A first LM guide(112) is installed in an inner wall of the first body. The second body is positioned inside the first body, and is moved to top and bottom through the first LM guide. A second LM guide(114) is installed in an inner wall of the second body. The third body is positioned inside the first body and the second body, and is moved top and bottom through the second LM guide. A robot arm is mounted on the third body. A driving part includes one driving motor installed inside the first body or the second body. A first driving shaft(116) and a second driving shaft(119) are installed in the first body and the second body. Each end of the first driving shaft and the second driving shaft is connected to the driving motor by a driving pulley and a belt(118).</p> |
