发明名称 |
Graded GexSe100-x concentration in PCRAM |
摘要 |
The present invention provides a design for a PCRAM element which incorporates multiple metal-containing germanium-selenide glass layers of diverse stoichiometries. The present invention also provides a method of fabricating the disclosed PCRAM structure.
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申请公布号 |
US7518212(B2) |
申请公布日期 |
2009.04.14 |
申请号 |
US20050195642 |
申请日期 |
2005.08.03 |
申请人 |
MICRON TECHNOLOGY, INC. |
发明人 |
MOORE JOHN T.;GILTON TERRY L.;CAMPBELL KRISTY A. |
分类号 |
H01L29/00;H01L21/8234;H01L27/24;H01L45/00 |
主分类号 |
H01L29/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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