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发明名称
PATTERN FORMATION BY LIFT-OFF METHOD
摘要
申请公布号
JPS59126686(A)
申请公布日期
1984.07.21
申请号
JP19830001184
申请日期
1983.01.10
申请人
KOGYO GIJUTSUIN (JAPAN)
发明人
ISHIDA ICHIROU
分类号
H01L21/306;H01L21/302;H01L21/3065;H01L39/24
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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