发明名称 METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To solve a problem that it is difficult to fully automate a releasing process of separating a substrate-resin sealed body composite body (or a metal plate-resin sealed body composite body when a substrate is a metal plate) finished by resin sealing into a resin sealed body and a substrate (the metal plate) since the releasing process is essential for electroforming package technique and a plating layer is formed directly on the substrate. SOLUTION: In the releasing process for an electroforming package in this manufacturing method, the substrate-resin sealed body composite body 3 and the operation point of pressing force in a direction where the substrate and resin sealed body 2 are released from each other are relatively moved to move the operation point backward from a tip portion of an outer portion of the substrate while the pressing force is applied to the tip portion of the outer portion of the substrate, thereby automatically separating the substrate-resin sealed body composite body 3 into the substrate and resin sealed body 2. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009076717(A) 申请公布日期 2009.04.09
申请号 JP20070244743 申请日期 2007.09.21
申请人 RENESAS TECHNOLOGY CORP 发明人 CHATANI YUKIHIRO
分类号 H01L23/12;H01L23/50 主分类号 H01L23/12
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