| 摘要 |
A system for storage and maintenance of semiconductor wafers or reticles under fabrication between process steps of the fabrication. The system is configured as either a stocker, an overhead transport system (OHT) or an overhead buffer (OHB with gas-purge ports which mechanically mate with a standard receptacle of a wafer/reticle carrier. A control circuit is attached to the gas-purge ports which controls gas flow into the carrier through gas purge port said Control is performed even in the absence of a communications network attached to the control circuit.
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