| 摘要 |
PROBLEM TO BE SOLVED: To provide a mounting stand structure that allows a thermal expansion/contraction difference by suctionally fixing a lid portion by drawing a vacuum to prevent the lid portion, an external mounting stand, etc., from cracking, breaking, etc. SOLUTION: The mounting stand structure 64 provided in a treatment container 32 of treatment equipment 30 to mount a body W to be treated includes an internal mounting stand 66 to which an internal container 66A formed in a container shape and a hollow internal strut 66B linked to the internal container are integrally coupled, an external mounting stand 68 to which an external container 68A covering a periphery of the internal container and an external strut 68B covering a periphery of the internal strut are integrally coupled, internal contents 70 contained in the internal container, a lid 72 covering an opening of the internal container and an opening of the external container and mounted with the body to be treated, a vacuum drawing means 74 of drawing a vacuum inside the internal mounting stand, and a purge gas supply means 76 of supplying purge gas to the gap between the internal mounting stand and external mounting stand. COPYRIGHT: (C)2009,JPO&INPIT
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