发明名称 METHOD FOR REDUCING POROSITY OF A METAL DEPOSIT BY IONIC BOMBARDMENT
摘要 The invention relates to a method for treating a metal deposit to reduce or eliminate the porosity thereof by bombarding the same with an ion source. The source is, for example, an electron cyclotron resonance (RCE) source. The metal can be gold. The ion bombardment has the effect of sealing the porosity of the metal deposit according to the type, energy, amount and angle of incidence of the ions.
申请公布号 WO2009044083(A2) 申请公布日期 2009.04.09
申请号 WO2008FR51623 申请日期 2008.09.11
申请人 QUERTECH INGENIERIE;BUSARDO, DENIS 发明人 BUSARDO, DENIS
分类号 C23C14/06;C23C8/36;C23C14/48;H01L21/3215 主分类号 C23C14/06
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