THREE DIMENSIONAL NANO DEVICES INCLUDING NANO STRUCTURE

摘要

A three dimensional nano device including nano structures is provided to complement electrical devices and optical devices to each other by improving electrical characteristics of nano device presented in a two-dimensional plane structure. A three dimensional nano device including nano structures comprises: at least one nano structure having a vibration unit(111) formed above a substrate and a support unit(112) supporting the both ends of the vibration unit; a support stand(120) formed on the substrate to support the support unit of the nano structures; a controller, formed in an upper part or lower part of the substrate or both sides of the upper part and lower part, for controlling the nano structures; a sensing unit(150) formed on the vibration unit to sense materials which are flowed in from the outside; and an external vibration unit formed in the lower part of the substrate.