PRECISE FINE POSITIONING DEVICE AND FINE POSITIONING STAGE HAVING THE SAME, ALIGNER, AND INSPECTION APPARATUS

摘要

PROBLEM TO BE SOLVED: To miniaturize a device for improving the degree of freedom in a precise fine positioning device that supports the weight of a moving stage by an elastic body and drives the moving stage by an actuator.

SOLUTION: The precise fine positioning device has: a fixing base; a stator in an electromagnetic actuator mounted onto the fixing base; a moving member in the electromagnetic actuator that opposes the stator via a fixed gap and can move vertically to the stator; an elastic support mechanism that stores a displacement sensor for detecting the relative displacement between the fixing and moving bases and mounts a lower end onto the fixing base; and the moving base in which the upper end of the elastic support mechanism and that of the moving member of the electromagnetic actuator are fixed.

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