A coherence remover is provided. In an embodiment the coherence remover includes a first mirror and a second mirror coupled to the first mirror. The coherence remover is configured to receive an input beam. Each of the first and second mirrors is configured to reflect a respective portion of the input beam to produce respective one or more intermediate beams. The intermediate beams collectively form an output beam that has a reduced coherence compared to the input beam.
申请公布号
US2009091734(A1)
申请公布日期
2009.04.09
申请号
US20080328251
申请日期
2008.12.04
申请人
ASML NETHERLANDS B.V. AND ASML HOLDING N.V.
发明人
VISSER HUIBERT;KLINKHAMER JACOB FREDRIK FRISO;RYZHIKOV LEV;COSTON SCOTT D.;JOOBEUR ADEL;VINK HENRI JOHANNES PETRUS;SHMAREV YEVGENIY KONSTANTINOVICH