SHAPE MEASURING INSTRUMENT WITH LIGHT SOURCE CONTROL

摘要

A shape measuring instrument which can be used even under an environment where intense ambient light is present comprises an optical system (1) of a shape measuring device which includes a laser dio de (2) emitting laser beam, a first optical system for irradiating an object to be measured with laser beam emitted, a second optical system for focusing laser beam which is reflected from the object to be measured, a CCD line sensor portion (13) for detecting a image location of laser beam from the second optical system, and a photo sensor (12) for meas uring intensity of laser beam from the second optical System, and respective laser beams branched by the partially transparent mirror (11) of the second optical system are d istributed to the CCD line sensor portion (13) and the photo sensor (12), and slit members (12a) are provided on a surface of the photo sensor (12).