发明名称 |
Bearbeitungsverfahren für Laser bearbeitete Teile unter Verwendung eines Klebstoffes mit einem Extinktionswert kleiner als 1 |
摘要 |
A method of manufacturing a laser processed part (9) is provided which is capable of processing at high speed and high precision when processing a workpiece (1) by optical absorption ablation of a laser beam (6), effectively suppressing contamination of a workpiece (1) surface by decomposition products, and recovering the workpiece (9) easily after processing. Another object is to present an adhesive sheet (2) for such a laser processing preferably used in the method of manufacturing a laser processed part (9). |
申请公布号 |
DE602006006727(D1) |
申请公布日期 |
2009.06.25 |
申请号 |
DE20066006727T |
申请日期 |
2006.01.11 |
申请人 |
NITTO DENKO CORP. |
发明人 |
MATSUO, NAOYUKI;URAIRI, MASAKATSU;HINO, ATSUSHI |
分类号 |
B23K26/40;B23K26/38;B23K101/40;B28D1/22;C09J7/02;C09J7/04;H01L21/68 |
主分类号 |
B23K26/40 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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