发明名称 Bearbeitungsverfahren für Laser bearbeitete Teile unter Verwendung eines Klebstoffes mit einem Extinktionswert kleiner als 1
摘要 A method of manufacturing a laser processed part (9) is provided which is capable of processing at high speed and high precision when processing a workpiece (1) by optical absorption ablation of a laser beam (6), effectively suppressing contamination of a workpiece (1) surface by decomposition products, and recovering the workpiece (9) easily after processing. Another object is to present an adhesive sheet (2) for such a laser processing preferably used in the method of manufacturing a laser processed part (9).
申请公布号 DE602006006727(D1) 申请公布日期 2009.06.25
申请号 DE20066006727T 申请日期 2006.01.11
申请人 NITTO DENKO CORP. 发明人 MATSUO, NAOYUKI;URAIRI, MASAKATSU;HINO, ATSUSHI
分类号 B23K26/40;B23K26/38;B23K101/40;B28D1/22;C09J7/02;C09J7/04;H01L21/68 主分类号 B23K26/40
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